Copper oxcide thin film deposited by evaporation assisted oxigen ion.
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چکیده
منابع مشابه
Low Resistive Copper Thin Film Deposited with Ultra-high Purity Target and Ecr-ion Beam Sputtering
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ژورنال
عنوان ژورنال: SHINKU
سال: 1991
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.34.244